Mems Pressure Sensor
Similar to other sensors, the MEMS pressure sensor converts the pressure into an electrical signal output during operation. MEMS pressure sensors operate by converting pressure signals into electrical signals via small strain gauges, called piezoresistors, implanted in a thin silicon membrane. Electronic components can be constructed on the same chip to measure the output of the sensors, perform signal processing and provide wireless communication. MEMS sensors can be used to measure physical parameters such as acceleration, temperature and pressure. Generally, MEMS pressure sensors are made by bulk silicon processing technology, and some are made by surface silicon processing technology. These MEMS-based pressure sensors provide robust solutions for the appliance, medical, consumer, industrial and automotive markets. Alternatively, the sensor and the electronics can be on separate devices connected. TDK's lineup ranges from miniature media-resistant pressure sensor elements with extended temperature ranges to high-precision pressure transmitters with. ST's ultra-small silicon pressure sensors use innovative MEMS technology to provide extremely high pressure resolution, in ultra-compact and thin packages. Our very large pressure sensor portfolio contains a wide variety of pressure ranges, diverse packaging and porting options.